Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754770 | Method and apparatus of diagnosing plasma in plasma space | Jeong Yun Lee, Chin-Wook Chung | 2017-09-05 |
| 9607853 | Patterning method using metal mask and method of fabricating semiconductor device including the same patterning method | Dong Chan Kim, Gyung-jin Min, Jae Hong Park, Je-Woo Han | 2017-03-28 |