Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852921 | Substrate treating apparatus and method of treating substrate | Ingi Kim, Mihyun PARK, Young-Hoo Kim, Ui-soon Park, Jung-Min Oh +2 more | 2017-12-26 |
| 9772296 | Method of inspecting a surface of a substrate and apparatus for performing the same | Byung-Bok Kang, Seok Min Kang, Bon-Ok Koo, Myung-Woo Kim, In-Gi Kim +5 more | 2017-09-26 |
| 9595434 | Apparatus and methods for manufacturing semiconductor devices and treating substrates | Kyoungseob Kim, Yongsun Ko, Seokhoon Kim, Kuntack Lee, Hyosan Lee | 2017-03-14 |