Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620392 | Single type apparatus for drying a substrate and single type system for cleaning a substrate including the same | Dong Soo Kim, Jae-Phil Boo, Kang-Min Paek, Jae Hoon Choi | 2017-04-11 |