Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9632437 | Lithography apparatus, method for lithography and stage system | Jin Hong Park, Jeong-Ho Yeo, Chang-Min Park | 2017-04-25 |
| 9575421 | Apparatus for protecting extreme ultra violet mask and extreme ultra violet exposure apparatus including the same | Myung-soo Hwang, Chang-Min Park | 2017-02-21 |