Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9536708 | Plasma generating device, method of controlling the same, and substrate processing device including the plasma generating device | Hee-Sun Chae, Jong Sik LEE, Han Saem Rhee, Hyun Jun Kim | 2017-01-03 |