Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685346 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Sam Kim, Sangheon Lee | 2017-06-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685346 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Sam Kim, Sangheon Lee | 2017-06-20 |