Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9704722 | Method of forming fine pattern and method of manufacturing integrated circuit device using the method | Jeong-Ju Park, Seung-chul Kwon, Jae-woo Nam, Shi-Yong Yi, Hyun-Woo Kim | 2017-07-11 |
| 9653294 | Methods of forming fine patterns and methods of manufacturing integrated circuit devices using the methods | Dae Yong Kang, Seung-chul Kwon, Shi-Yong Yi | 2017-05-16 |
| 9627201 | Methods of forming holes using mask pattern structures | Jae-woo Nam | 2017-04-18 |