Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691618 | Methods of fabricating semiconductor devices including performing an atomic layer etching process | Sejin OH, Je-Hun WOO, Hyunju Lee, Seungkyu LIM, Kiho Hwang | 2017-06-27 |