Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601397 | Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system | Se Jin Oh, Woong Ko, Vasily Pashkovskiy, Ki Ho Hwang | 2017-03-21 |
| 9564295 | Diagnosis system for pulsed plasma | Dong Soo Lee, Sung Ho JANG, Byeong-Hee Kim, Dong Ok SHIN | 2017-02-07 |