Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9809880 | Atomic layer deposition apparatus | In-Kyo Kim, Suk-Won Jung, Myung-Soo Huh | 2017-11-07 |
| 9556520 | Method of depositing an atomic layer | Sung-Hun Key, In-Kyo Kim, Suk-Won Jung, Myung-Soo Huh | 2017-01-31 |