Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748081 | Method of manufacturing semiconductor device and sputtering apparatus | Hideaki Tsugane, Hidenori Suzuki | 2017-08-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748081 | Method of manufacturing semiconductor device and sputtering apparatus | Hideaki Tsugane, Hidenori Suzuki | 2017-08-29 |