Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711423 | Methods for manufacturing semiconductor device and for detecting end point of dry etching | Toshikazu HANAWA, Kentaro Yamada | 2017-07-18 |
| 9595468 | Method of manufacturing semiconductor device that uses treatment to enhance hydrophilicity of spin coated insulating film | Toshikazu HANAWA | 2017-03-14 |