Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9548584 | Method and arrangement to generate few optical cycle coherent electromagnetic radiation in the EUV-VUV domain | Gábor Almási, János Hebling, Mátyás Mechler, Zoltán Tibai | 2017-01-17 |