Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804508 | Linear motor, stage apparatus, and exposure apparatus | Tadahiro Kominami | 2017-10-31 |
| 9538399 | Wireless communication apparatus and method for controlling wireless communication apparatus | — | 2017-01-03 |