Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748441 | Dry etching method of manufacturing semiconductor light emitting device substrate | Yoshihisa Hatta, Kei Shinotsuka, Yasuhito Kajita | 2017-08-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748441 | Dry etching method of manufacturing semiconductor light emitting device substrate | Yoshihisa Hatta, Kei Shinotsuka, Yasuhito Kajita | 2017-08-29 |