Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728382 | Evaporation source | Joerg Vetter, Stefan Esser, Juergen Mueller | 2017-08-08 |
| 9551066 | High-power pulsed magnetron sputtering process as well as a high-power electrical energy source | Jones Alami, Jurgen Muller, Jörg Vetter | 2017-01-24 |
| 9551067 | Coating method for depositing a layer system on a substrate and substrate having a layer system | Jörg Vetter, Jurgen Muller | 2017-01-24 |