TM

Tomoo Motosugi

NT Nuflare Technology: 2 patents #15 of 69Top 25%
Overall (2017): #97,628 of 506,227Top 20%
2
Patents 2017

Issued Patents 2017

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9852883 Charged particle beam drawing apparatus and charged particle beam drawing method — 2017-12-26
9583310 Charged particle beam writing apparatus, charged particle beam writing method, and shot correction method of charged particle beam writing method — 2017-02-28