Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691607 | Process for producing epitaxial silicon carbide single crystal substrate and epitaxial silicon carbide single crystal substrate obtained by the same | Takashi Aigo, Hiroshi Tsuge, Tatsuo Fujimoto, Masakazu Katsuno, Masashi Nakabayashi +1 more | 2017-06-27 |