Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753363 | Scanner based optical proximity correction system and method of use | Jacek Tyminski, Raluca Popescu | 2017-09-05 |
| 9551938 | Light source optimizing method, exposure method, device manufacturing method, program, exposure apparatus, lithography system, light source evaluation method, and light source modulation method | Naonori Kita | 2017-01-24 |