TM

Tomoki Miyakawa

NI Nikon: 2 patents #37 of 279Top 15%
Overall (2017): #97,662 of 506,227Top 20%
2
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9798252 Exposure apparatus, movable body apparatus, and device manufacturing method — 2017-10-24
9746787 Holding apparatus, exposure apparatus and manufacturing method of device — 2017-08-29