Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9613791 | Calcium fluoride optical member, manufacturing method therefor, gas-holding container, and light source device | Motofusa Kageyama | 2017-04-04 |
| 9580331 | CaF2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing CaF2 polycrystalline body | Seishi Fujiwara, Yuka Narukawa | 2017-02-28 |