Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9539800 | Substrate bonding apparatus, substrate holding apparatus, substrate bonding method, substrate holding method, multilayered semiconductor device, and multilayered substrate | Yoshiaki Kito, Hiroshi Shirasu, Daisuke Yuki, Kazuhiro Suzuki, Isao Sugaya | 2017-01-10 |