Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9817319 | Apparatus and method for providing fluid for immersion lithography | Alex Ka Tim Poon | 2017-11-14 |
| 9547243 | Apparatus and method for providing fluid for immersion lithography | Alex Ka Tim Poon | 2017-01-17 |