| 9816805 |
Compensation for Goos-Hanchen error in autofocus systems |
Daniel Gene Smith |
2017-11-14 |
| 9810530 |
Autofocus system and method |
Daniel Gene Smith |
2017-11-07 |
| 9638799 |
Scan mirrors for laser radar |
Daniel Gene Smith, Alexander Cooper, Mina Rezk, Anthony R. Slotwinski, Thomas M. Hedges |
2017-05-02 |
| 9625368 |
Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure |
David M. Williamson, Daniel Gene Smith, Michel Pharand, Alexander Cooper, Alec Paul Robertson +1 more |
2017-04-18 |
| 9618619 |
Radar systems with dual fiber coupled lasers |
Mina Rezk, Anthony R. Slotwinski, Daniel Gene Smith, Alexander Cooper, Thomas M. Hedges |
2017-04-11 |
| 9605948 |
Minimization of Abbe error caused by tip or tilt between an encoder head and a wafer stage for arbitrary location of a center of rotation |
Zhiqiang Liu |
2017-03-28 |
| 9534934 |
High resolution encoder head |
— |
2017-01-03 |