AE

Akimitsu Ebihara

NI Nikon: 2 patents #37 of 279Top 15%
Overall (2017): #173,758 of 506,227Top 35%
2
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9810995 Exposure apparatus and device manufacturing method 2017-11-07
9551943 Exposure apparatus and device manufacturing method 2017-01-24