Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803280 | Method and apparatus for depositing atomic layers on a substrate | Freddy Roozeboom, Joop Van Deelen | 2017-10-31 |
| 9761458 | Apparatus and method for reactive ion etching | Freddy Roozeboom, Adriaan Marinus Lankhorst, Paulus Willibrordus George Poodt, Norbertus Benedictus Koster, Gerardus Johan Jozef Winands | 2017-09-12 |