Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852948 | Apparatus and method for processing a substrate | Bing-Joe Hwang, Wei-Nien Su, Yuan-Han Chu, Tse-Ming Chiu, Hsin-Fu Teng | 2017-12-26 |
| 9581434 | Apparatus and method for measuring pattern of a grating device | Mohammad Hossein Goudarzi Khouygani, Meng-Jyun Lin | 2017-02-28 |