Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9814143 | Method of forming pattern with high aspect ratio on polycrystalline aluminum nitride substrate | Chung-Yen Lu, Chia-Ting Lin, Lea-Hwung Leu | 2017-11-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9814143 | Method of forming pattern with high aspect ratio on polycrystalline aluminum nitride substrate | Chung-Yen Lu, Chia-Ting Lin, Lea-Hwung Leu | 2017-11-07 |