Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828239 | Method of making a system-in-package device, and a system-in-package device | Sami NURMI | 2017-11-28 |
| 9829405 | Micromechanical pressure sensor structure having a side wall layer | Koichi Yoshida | 2017-11-28 |
| 9663352 | Microelectromechanical device and a method of manufacturing | Sami NURMI | 2017-05-30 |
| 9611139 | Resonator | — | 2017-04-04 |
| 9541464 | Pressure sensor structure | — | 2017-01-10 |