Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828673 | Method of forming very reactive metal layers by a high vacuum plasma enhanced atomic layer deposition system | Peter Chow | 2017-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828673 | Method of forming very reactive metal layers by a high vacuum plasma enhanced atomic layer deposition system | Peter Chow | 2017-11-28 |