Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841670 | Support frame for pellicles | Yosuke Ono, Daiki Taneichi, Yasuyuki Sato, Toshiaki Hirota, Kiyokazu Koga | 2017-12-12 |
| 9780008 | Semiconductor device, method for manufacturing the same, and rinsing liquid | Shoko Ono, Yasuhisa Kayaba, Hirofumi Tanaka, Tsuneji Suzuki | 2017-10-03 |
| 9703187 | Pellicle and EUV exposure device comprising same | Yosuke Ono | 2017-07-11 |