Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846028 | Film thickness measurement method and film thickness measurement device | Tetsuhisa Nakano | 2017-12-19 |
| 9831114 | Self-aligned trench isolation in integrated circuits | Ching-Huang Lu, Lei Xue, Rinji Sugino, Simon S. Chan | 2017-11-28 |