Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9678435 | Horizontal development bias in negative tone development of photoresist | Yunfei Deng, Yuri Granik, Dmitry Medvedev, Yuan He | 2017-06-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9678435 | Horizontal development bias in negative tone development of photoresist | Yunfei Deng, Yuri Granik, Dmitry Medvedev, Yuan He | 2017-06-13 |