Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653264 | Inductively coupled plasma source for plasma processing | Vladimir Nagorny, Dongsoo Lee | 2017-05-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653264 | Inductively coupled plasma source for plasma processing | Vladimir Nagorny, Dongsoo Lee | 2017-05-16 |