Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829804 | Substrate holding device, method for manufacturing such a device, and use of such a device in a lithography system | Paul IJmert Scheffers | 2017-11-28 |
| 9703213 | Substrate processing apparatus | Diederik Geert Femme Verbeek | 2017-07-11 |