Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847339 | Self-aligned multiple patterning semiconductor device fabrication | Chien-Ying Lee, Tzung-Ting Han | 2017-12-19 |
| 9553047 | Method of manufacturing semiconductor devices with combined array and periphery patterning in self-aligned quadruple patterning | Tzung-Ting Han, Miao-Chih Hsu | 2017-01-24 |