Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715170 | Optical proximity correction method and method of manufacturing extreme ultraviolet mask by using the optical proximity correction method | Sang Hwa Lee | 2017-07-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715170 | Optical proximity correction method and method of manufacturing extreme ultraviolet mask by using the optical proximity correction method | Sang Hwa Lee | 2017-07-25 |