Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551672 | Defect classifying method and optical inspection apparatus for silicon carbide substrate | Hirokazu Seki, Masamichi Shinoda, Yoshihiro Nakano, Makoto TORIZAWA | 2017-01-24 |