Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779979 | Apparatus for liquid treatment of wafer shaped articles | Milan Pliska | 2017-10-03 |
| 9698029 | Method and apparatus for processing wafer-shaped articles | Christian Putzi | 2017-07-04 |