Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543158 | Technique to deposit sidewall passivation for high aspect ratio cylinder etch | Eric A. Hudson | 2017-01-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543158 | Technique to deposit sidewall passivation for high aspect ratio cylinder etch | Eric A. Hudson | 2017-01-10 |