Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779977 | End effector assembly for clean/dirty substrate handling | Ross Embertson, Brandon Senn, Austin Ngo | 2017-10-03 |
| 9698035 | Microstructures for improved wafer handling | — | 2017-07-04 |
| 9673071 | Buffer station for thermal control of semiconductor substrates transferred therethrough and method of transferring semiconductor substrates | Keith Freeman Wood | 2017-06-06 |