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Masaichiro Ken Matsushita

Lam Research: 1 patents #161 of 396Top 45%
Overall (2017): #320,683 of 506,227Top 65%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9589818 Apparatus for liquid treatment of wafer shaped articles and liquid control ring for use in same Koichi Tasaka 2017-03-07