Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9662686 | Ultrasonic cleaning method and apparatus | Alexander R. Lippert | 2017-05-30 |
| 9548221 | Method and apparatus for processing wafer-shaped articles | Alexander R. Lippert | 2017-01-17 |