Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799539 | Method and apparatus for liquid treatment of wafer shaped articles | — | 2017-10-24 |
| 9616451 | Apparatus for processing wafer-shaped articles | Mike Daniel Kollmann, Christian Thomas Fischer | 2017-04-11 |