Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9581498 | Rotating-element spectroscopic ellipsometer and method for measurement precision prediction of rotating-element spectroscopic ellipsometer, recording medium storing program for executing the same, and computer program stored in medium for executing the same | Won Chegal, Hyun Mo Cho | 2017-02-28 |