Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666454 | Wafer storage apparatus having gas charging portions and semiconductor manufacturing apparatus using the same | In Ho Choi | 2017-05-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666454 | Wafer storage apparatus having gas charging portions and semiconductor manufacturing apparatus using the same | In Ho Choi | 2017-05-30 |