Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9695509 | Substrate processing apparatus, purging apparatus, method of manufacturing semiconductor device, and recording medium | Makoto Hirano | 2017-07-04 |
| 9564706 | Connection unit | Hiroyuki Ozawa, Takehiro Endo, Akihiko Takemura | 2017-02-07 |