Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715995 | Apparatus and methods for electron beam lithography using array cathode | Alan D. Brodie, Paul F. Petric | 2017-07-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715995 | Apparatus and methods for electron beam lithography using array cathode | Alan D. Brodie, Paul F. Petric | 2017-07-25 |