Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823121 | Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line | Mei Sun, Kevin O'Brien | 2017-11-21 |
| 9719867 | Method and system for measuring heat flux | Stephen Sharratt, Farhat A. Quli, Mei Sun | 2017-08-01 |
| 9620400 | Position sensitive substrate device | Kevin O'Brien | 2017-04-11 |