Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778203 | Inspection apparatus, inspection method, and program | — | 2017-10-03 |
| 9689806 | Inspection apparatus, inspection method, and program | — | 2017-06-27 |
| 9673094 | Semiconductor device having via hole coated in side surfaces with heat treated nitride metal and method to form the same | Tadashi Watanabe | 2017-06-06 |